Ultrashort Pulsed Laser Induced Heat Affected Zones Characterized by Ion Channeling Contrast Imaging
نویسندگان
چکیده
Ultrashort pulsed lasers continue to see expanded application in many technologies such as microelectronics and precision manufacturing. The extremely short time duration (picosecond to femtosecond time scales) of these laser pulses create extremely non-equilibrium conditions during the heating and ablation of target materials. The result is generally efficient machining with little to no heat affected zone (HAZ) in the vicinity of ablation. The extent and nature of any possible HAZ continues to be studied by materials characterization methods including electron backscatter diffraction (EBSD) [1] or transmission electron microscopy (TEM) [2]. The effect of pulse duration variation in the ultrashort time scales (ps to fs) has not been widely studied.
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